JPH0217261U - - Google Patents
Info
- Publication number
- JPH0217261U JPH0217261U JP9354588U JP9354588U JPH0217261U JP H0217261 U JPH0217261 U JP H0217261U JP 9354588 U JP9354588 U JP 9354588U JP 9354588 U JP9354588 U JP 9354588U JP H0217261 U JPH0217261 U JP H0217261U
- Authority
- JP
- Japan
- Prior art keywords
- carrier
- film forming
- water tank
- holding means
- temperature
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 7
- 239000007788 liquid Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Coating Apparatus (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9354588U JPH0217261U (en]) | 1988-07-14 | 1988-07-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9354588U JPH0217261U (en]) | 1988-07-14 | 1988-07-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0217261U true JPH0217261U (en]) | 1990-02-05 |
Family
ID=31318012
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9354588U Pending JPH0217261U (en]) | 1988-07-14 | 1988-07-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0217261U (en]) |
-
1988
- 1988-07-14 JP JP9354588U patent/JPH0217261U/ja active Pending
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